Discover the latest content written by Ally Head, Senior Health and Sustainability Editor at Marie Claire UK.
Day: July 19, 2026
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The extreme ultraviolet (EUV) pellicle is a freestanding membrane that protects EUV masks from particle contamination during EUV exposure. Although a high EUV transmittance of the pellicle is required to minimize the loss of throughput, the degradation of EUV transmittance during the extended exposure of the pellicle has been recently reported. This may adversely affect the throughput of the …
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